The design and fabrication of the proposed MEMS accelerometer. a Schematic diagram of the accelerometer with two-layered proof mass. The upper layer has flexures, stiffness tuning electrodes, and ...
(IMAGE) Aerospace Information Research Institute, Chinese Academy of Sciences Caption Schematic diagrams of graphene NEMS accelerometers. a 3D schematic of the proposed graphene NEMS accelerometer. b ...
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